서강대학교 로욜라도서관

탑메뉴

전체메뉴

전체메뉴닫기


검색

학술논문(Articles)검색

상세검색
검색어
[키워드: "Kelling, Mark"]

검색결과제한

  • Facet Limit
    • 원문(Full Text)
    • Peer-Reviewed 학술지
    • -

    재검색

  • 자료유형
    • Magazines(7)
    • Conference Materials(3)
    • Academic Journals(1)

  • 주제어
    • 3d(1)
    • 450mm(1)
    • cd-afm(1)
    • cd-sem(1)
    • companies(1)
    • components, circuits, devices and systems(1)
    • critical dimension(1)
    • cu beol(1)
    • cu damascene(1)
    • engineered materials, dielectrics and plasmas(1)
    • films(1)
    • green products(1)
    • hybrid metrology(1)
    • lithography(1)
    • low-k(1)
    • nm(1)
    • node(1)
    • plasmas(1)
    • scatterometry(1)
    • throughput(1)

  • 저널
    • proceedings of spie(8)
    • 2013 ieee international electron devices meeting(1)
    • 2016 ieee international interconnect technology conference / advanced metallization conference (iitc/amc), interconnect technology conference / advanced metallization conference (iitc/amc), 2016 ieee international(1)
    • journal of micro-nanolithography mems and moems(1)

  • 발행처
    • ieee(2)
    • spie - international society of optical engineering(1)
    • spie-soc photo-optical instrumentation engineers(1)

  • 언어
    • english(10)

  • 수록DB
    • Supplemental Index(7)
    • USPTO Patent Grants(4)
    • Complementary Index(2)
    • USPTO Patent Applications(2)
    • Science Citation Index(1)
    • IEEE Xplore Digital Library(1)

17

1 - 10 다음페이지로

내보내기

내보내기
내보내기 형식을 선택하세요.

o RefWorks에서 이용 가능한 형식으로 반출합니다.

o EndNote에서 이용 가능한 형식으로 반출합니다.

12